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用镜像电荷法求取共面互连线寄生参数

Image Method Used for Coplanar Interconnects Dependent Parameter Calculation
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摘要 采用介质镜像格林函数法求解芯片中共面传输线的宽频带特性,得到了4层介质结构的格林函数级数表达式,并采用层次法加快了计算速度.研究了半导体Si衬底共面传输线的频变电容和电导参数,其结果与由全电荷格林函数法得到的结果一致. The dielectric image Green's function approach was applied to calculate the Green's function as a three multiply infinite series and the hierarchical algorithm was also used to improve the computation efficiency. The frequency dependent distributed capacitance and conductance of the coplanar transmission lines on lossy Si semi-conduct substrate were studied. The validity of the method is proved by comparison with the result of total-charge Green's function approach.
出处 《上海交通大学学报》 EI CAS CSCD 北大核心 2004年第5期729-732,737,共5页 Journal of Shanghai Jiaotong University
关键词 超大规模集成电路 镜像电荷法 复数介质格林函数 层次法 矩量法 Algorithms Calculations Green's function Method of moments Optical interconnects
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