摘要
用激光干涉型光学头产生干涉条纹,采用空间光调制器(SLM)进行子图输入实现光学可变图像(DVD)的快速光刻,分辨率可达5080dpi,平均运行效率达8000dots/s(1270pdpi)以上。研制了大幅面激光光刻系统,给出了实验结果。
An optical configuration was proposed to realize the fast etching of optical variable device on laser lithographic system. The grating interference head is used to generate the interferential fringes and the spatial light modulator (SLM) is used as the sub-image input device. The resolution of optical variable device can be achieved up to 5080 dpi. This system can be run in very high efficient mode with 8000 dots/s. The large format laser lithographic system has been fabricated and the result is given.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2004年第5期561-564,共4页
Journal of Optoelectronics·Laser
基金
教育部跨世纪人才基金资助项目
