摘要
采用旋转镀膜工艺和紫外光固化技术在石英基片上制备出了快速固化的丙烯酸酯/二氧化硅有机/无机杂化单层宽带光学增透膜,考察了丙烯酸酯与正硅酸乙酯的物质的量之比对薄膜增透性能等的影响。实验结果表明,该比值为2.0时,增透膜的最大透射率为99.0%,采用旋转镀膜工艺制备的有机/无机杂化单层增透膜在425～1060nm的较宽波段范围内透射率均达98%以上。
Acrylates/silica hybrid antireflective film was prepared by spin coating and UV curing technological process. The relationship between the mole ratio of acrylates and TEOS γ value, peak transmission wave-length, reflective index of film were discussed. It is shown that the hybrid film has a wide band of transmission between 425～1 060nm when the γ value is 2.0, when the transmission is above 98%.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2004年第5期623-626,共4页
High Power Laser and Particle Beams
基金
国家863计划项目资助课题
