摘要
采用溶胶-凝胶法,结合氨水后处理工艺制备了抗真空有机物污染的二氧化硅增透膜。该膜峰值透光率为99.8%,在有机污染的真空系统中(10-3Pa)保持168 h,透光率曲线变化微小,而同样条件下常规二氧化硅增透膜的峰值透光率下降至95.5%。并采用分光光度计、红外光谱、扫描探针显微镜、静滴接触角测量仪、椭偏仪等测试手段分析了薄膜的特性。
Silica antireflective coatings with vacuum organic contamination resistant property were prepared by sol-gel method along with ammonia post-treatment. The peak transmittance of such a coating was approximately 100 %. Exposing the coating to a vacuum of 10^-3 Pa with silicone oil for one week, the transmittance showed little change. However, the peak transmittance of the coating without ammonia post-treatment decreased from 100 ; to 95.5 ; under the same condition. The properties of the coatings were analyzed by spectrophotometry, FTIR-spectroscopy, scanning probe microscope method, contact angle measurement, and spectroscopic ellipsometry.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2007年第5期767-770,共4页
High Power Laser and Particle Beams
基金
国家863计划项目资助课题
关键词
抗真空有机物污染
溶胶-凝胶
二氧化硅
增透膜
氨水
Vacuum organic contamination resistant property
Sol-gel
Silicon dioxide
Antireflective coating
Ammonla
