摘要
设计并研制了用于母盘刻录机的高精密运动工作台及其控制系统。工作台控制系统采用线光栅作为工作台位移检测工具。采用数字位置环和模拟电流环组成双闭环随动系统,其中位置控制器是带有速度前馈和加速度前馈的数字PID伺服滤波器。实验结果表明,该系统可以满足母盘刻录机的要求。
An approach of high precision table and its control system for optical disc mastering device is proposed. The control system is a followup system with double closeloop:digital position loop and analog current loop. Lincar grating is adopted as position measuring tool. The DSP based on position controller combines PID servo, velocity feedforward and acceleration feedforward to improve response speed. Experiment results show it can meet the need of optical disc mastering.
出处
《光学技术》
CAS
CSCD
2003年第6期723-726,共4页
Optical Technique
基金
973国家重点基础研究规划项目资助(G19990330)
