摘要
从理论上分析了小型精密ｘ－Ｙ工作台的各种误差。针对这些误关，给出一些确实可行的措施来减小机械系统的误差；用软件对系统的几种误差进行了补偿。在此基础上，讨论了工作台开环系统及闭环系统的精度。提出了测量导轨直线性误差的新方案，使测量方法的原理误差降低到完全可以忽略不计的程度。
In theory,all kinds of errors of The Miniature Fine X Y Worktable are analyzed.Beingaimed at these errors,some feasible measurements of reducing the mechanical system errorsare raised in this paper;some errors are compensated by using software. On the basis ofthem,the precision of the open loop and loop locked system is discussed.Specially,a newway of measuring slideway straightness is raised,it reduces the principle error in the measurement way to the degree that can be ignored completely.
出处
《光学精密工程》
EI
CAS
CSCD
1995年第4期87-92,共6页
Optics and Precision Engineering
关键词
精密工作台
误差分析
误差补偿
坐标仪
Miniature fine X Y worktable,Error analysis,Error compensation,Slide-way straightness measurement
