摘要
文章对等离子清洗技术做了全面介绍,不仅介绍了有关等离子的基本概念、低温等离子体制备技术及其相关装置,而且着重介绍了它在精密清洗中的应用及其注意事项。
This article gives a full view about the plasma cleaning technique. It not only includes the general idea of plasma ,the technology of preparing low temperature plasma and its related equipment ,but also tells its application and points of attention in precision instrument cleaning .Plasma Cleaning will play an important role in elimination of ODS cleaning agent.
