摘要
介绍了Plasma清洁的原理;通过测量水滴角大小来检测压合区Plasma清洁效果,制定了电极的更换周期;研究Plasma清洁机构运行时间,优化机构参数并调整传动机构运行方式,提升了Plasma机构运行效率,降低了清洁成本。
Introduce the theory of Plasma cleaning. According to the contact angle that test the cleaning result, set up the electrode recycle time;Studying the nmtime of the Plasma unit, optimize the parameter and change gearing unit from serial transmission to parallel transmission, Thus improve the efficiency of Plasma unit and save running cost.
出处
《苏州大学学报（工科版）》
CAS
2008年第3期37-39,共3页
Journal of Soochow University Engineering Science Edition (Bimonthly)
