摘要
表面涂层技术能够改变材料及其制件表面成分和组织结构,获得性能优异的表面薄层,因而广泛应用于各行业。目前普遍采用的制备工艺是PVD和CVD技术。比较研究这两种技术及其改进方法,并分析膜厚检测、薄膜成分和结构以及力学性能等测试技术。
The surface coating techniques,which modify the surface components and structure of materials and their articles and thus yield surface coatings of good performance,are widely used in industries.At present,PVD and CVD are the most popular techniques for preparing surface coatingThis paper compares the two techniques and studies the improved ones.On this basis,it has discussed the coating thickess measurement,coating component and structure determination as well as the testing of mechanical properties of coatings
出处
《武汉科技大学学报》
CAS
2003年第3期241-244,261,共5页
Journal of Wuhan University of Science and Technology
关键词
表面涂层
制备工艺
测试技术
surface coating
preparation techniquee
testing technique
