摘要
综述了金刚石、类金刚石碳、立方氮化硼以及碳－ 氮超硬涂层的一些新的研究进展，并着重对４ 种超硬涂层的制备研究作介绍。
n this paper some recent developments of the superhard coatings of diamond、diamond-like carbon(DLC),C-BN and C-N were summarized,the researchs on four superhard coationgs preparation were emphatically introduced.
出处
《真空与低温》
1999年第3期157-161,共5页
Vacuum and Cryogenics
