摘要
以V2O5粉末为原料,采用无机溶胶-凝胶法制备了V2O5凝胶膜,经过真空退火处理得到了以VO2为主的薄膜。利用X射线衍射(XRD)和原子力显微镜(AFM)对不同实验条件下得到的薄膜的物相和表面形貌进行分析,得出了VOx薄膜相结构及表面形貌与真空退火条件之间的关系。
V2O5 thin films were prepared by inorganic solgel method with V2O5 powders. Through annealed in vacuum, the V2O5 thin films can be transfered to VO2 films. Xray diffraction(XRD) and atomic force microscopy(AFM) were used to study the phase and morphology of the thin films prepared in different vacuum annealing conditions. The relationships between phases, morphology of VOx and vacuum annealing conditions were obtained.
出处
《真空与低温》
2003年第3期148-151,共4页
Vacuum and Cryogenics
