摘要
介绍了几种新型微机电系统(MEMS)光开关的设计、制造和性能.研制了一种摆动式微电磁驱动器,用其驱动反射镜切入和切出光路.在此基础上,研制了1×2、2×2、1×4和1×8四种典型的MEMS光开关,达到了较好的性能.这些光开关可广泛应用于光纤通信系统.
This paper introduced the design, fabrication and performance of some novel MEMS (micro-electro-mechanical system) optical switches. A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch. Four optical switches of 1×2, 2×2, 1×4 and 1×8 were fabricated, whose performance is favorable. Those optical switches can be widely used in optical fiber communication systems.
出处
《上海交通大学学报》
EI
CAS
CSCD
北大核心
2003年第9期1468-1471,共4页
Journal of Shanghai Jiaotong University
基金
上海市光科技启动计划资助项目(012261012)
中国博士后基金(B3180A)
关键词
光纤通信
光开关
微机电系统
微电磁驱动器
Design
Microactuators
Microelectromechanical devices
Optical communication
