摘要
电磁型超微型电动机是微机电系统中的关键部件.论述了直径1～3mm电磁型超微型电动机设计中的若干关键问题,如微型电动机的结构设计、磁路设计,以及微型电动机中的发热、温升和微摩擦问题等.简要地讨论了电磁型微型电动机的应用前景,例举了它在医学内窥镜、微泵。
MEMS( micro electronic mechanical system) is a newly developing research field since1 980 s. Some crux technologies for the design of electromagnetic micro- motor with diameter of1～ 3mm were dis- cussed,including the heat- radiation and micro- friction improvements and the design of magnetic circuit etc.Besides the marrow of design plotof this type of micro- motor,the details of its applications as indis- pensable components in endoscope,micro- pump and micro- laser- scanner were also given at the end.
出处
《上海交通大学学报》
EI
CAS
CSCD
北大核心
2000年第3期430-432,共3页
Journal of Shanghai Jiaotong University
基金
国家"8 6 3"计划重点资助项目! ( 5 12 -0 4-0 1)
关键词
电磁型微电动机
微电子机械
超微型电动机
electromagnetic micro- motor
micro- motor
micro electronic mechanical system ( MEMS)
