摘要
介绍了光开关、MEMS和MEMS光开关的基本概念。基于功能实现,重点分析了二维和三维MEMS光开关的实现机理与特性。针对两者不足,研究了一维MEMS光开关。分析了MEMS光开关的驱动方式,并针对静电驱动、二维MEMS光开关,研究了MEMS光开关控制系统。
The basic concept of optical switch, MEMS and MEMS optical switch were introduced. Based on the function realization, the theory and characteristics of 2D and 3D MEMS optical switches were primarily analyzed.Aecording to the shortage of the two typical MEMS optical switches, 1D MEMS optical switch was researched. The MEMS optical switch drive method was analyzed and the MEMS optical switch control system was researched according to electrostatic drive 2D MEMS optical switch.
出处
《半导体技术》
CAS
CSCD
北大核心
2007年第4期342-344,共3页
Semiconductor Technology
基金
武汉理工大学校基金项目(XJJ2004071)
