摘要
文中阐述了基于自行研制的原子力显微镜(AFM)的纳米刻蚀加工方法,研究了针尖上的载荷大小和扫描次数对加工深度的影响,利用AFM的微探针在氧化铝(Al2O3)材料表面加工出纳米结构,验证了该加工方法的可行性。实验结果表明基于AFM的纳米刻蚀技术可作为加工纳米器件的重要手段。
A method of nanofabrication using atomic force microscopy is described.It is shown that the depth of fabrication depends on the load and scanning times of the tip.Nanostructures are obtained on surface of Al2O3 with the tip of AFM. And reliability of this method is approved.It points that nanofabrication based on AFM can be a powerful tool for production of nanoscale devices.
出处
《激光与红外》
CAS
CSCD
北大核心
2003年第4期283-284,296,共3页
Laser & Infrared
