摘要
研制了双成象单元扫描隧道显微镜（ＳＴＭ），可同时对参考样品的原子晶格和被测样品扫描成象．计数原子晶格的数目，即可精确测定被测样品图象的尺度，以原子尺方式实现严格的纳米计量．本文介绍双成象单元的ＳＴＭ的原理和仪器系统，讨论原子尺纳米计量的可行性，给出被测样品图象的纳米计量结果．
A dual imaging unit scanning tunneling microscope(DIU STM)is developed.It simultaneously scans a reference sample(crystalline lattice)and a test sample by using one single XY scanner.The size of the test sample image can be precisely measured by counting the number of lattices.This article describes the measurement concept and the insturment of DIU STM.The crystalline lattice images of two HOPG chips are scanned by the DIU STM to check the feasibility of nano metrology based on the atomic reference scale.One metrological result of test sample image based on HOPG lattices is provided.
出处
《光子学报》
EI
CAS
CSCD
1998年第10期886-889,共4页
Acta Photonica Sinica
