摘要
利用自行研制原子力显微镜开发了一套纳米加工系统,系统利用软件预先读入图形,根据图形控制探针的精确走向,实现复杂图案的矢量式扫描刻蚀,并且对陶瓷管的非线性畸变实现了软件矫正,实验表明系统可加工出精细的纳米图形,为进一步加工出更为精细复杂的纳米器件奠定了基础。
A new nano-fabrication system based on AFM is presented. Using this system,a sophisticated pattern can be obtained on the surface of Al_2O_3,getting the pattem from a picture by software to control the precise steps of the cantilever and the tip. The no-linear aberration of piezo-tube is corrected by software of this system.In the experiment, structure of nano-scale is obtained, and more sophisticated nano elements can be obtained in further research.
出处
《光学仪器》
2005年第2期76-79,共4页
Optical Instruments
关键词
AFM
纳米结构
刻蚀
AFM
nano-structure
lithography
