摘要
提出一种结构简单、使用方便的用于微电子机械部件运动状态测量的光纤斐索干涉装置。考虑到光纤出射光束的发散 ,在有效反射率中引入了损耗因子 ,讨论了它的基本工作原理。为了提高测量精度和最小可探测距离 ,光纤探头固定在一个PZT上作可控调制。用该装置测量了喇叭膜片在多种驱动条件下的运动状态 ,进行了数据处理和讨论。
A fiber Fizeau interferometer for measurement of micro-vibration of MEMS devices is presented, which is simple in configuration and easy to operate. Its principle is discussed, taking the divergent optical beam emitted from the fiber into consideration, which causes a loss factor for the effective reflectance. In order to improve the accuracy and the minimun detectable displacement the fiber probe is stuck on to a piezoelectric transducer(PZT) to get controllable modulation. Movement of the membrane of a loudspeaker under various driving conditions is measured. The results are described and discussed.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2000年第3期221-224,共4页
Semiconductor Optoelectronics
基金
国家攀登计划B"微电子机械"项目! (94- 0 30 7)
