摘要
针对现场真空校准需求,设计出校准范围为105~10-7 Pa的现场真空计校准装置。装置集成了比较和标准流导两种校准方法,采用模块化设计减小了装置的体积和重量;通过触摸屏或计算机实现自动化数据采集及操作控制,装置能够自动出具并上传校准证书;校准室通过特殊工艺处理及双极串联抽气机组抽气,设计的极限真空度为10-8 Pa量级;采用流导法和定容法设计出10-2~10-10 Pa·m3/s的复合型标准气体流量计,解决了宽量程标准流量的提供问题。本现场真空校准装置设计的校准范围为105~10-7 Pa,外形尺寸不超过500 mm×500 mm×600 mm,主体重量小于50 kg,具有校准范围宽、便携、自动化程度高等优点。
A novel type of portable automatic calibration apparatus has been successfully developed for the on-site calibration of vacuum gauge in(105~10-7)Pa range.The self-developed mobile calibrator,comprising the ultrahigh vacuum(UHV)chamber in 10-8Pa base-pressure,double-pole molecular pump,lab-built compound standard gas flowmeter operating by flow and constant-volume methods in 10-2~10-10 Pa·m3/s range,host-computer and/or LCD touchscreen monitor,integrated the comparison and standard conductance calibration methods by means of modularization design.The prototyped vacuum gauge calibrator,500 mm×500 mm×600 mm in size and 5 kg in gross-weight,was extensively tested.The results show that the calibrator is capable of covering a wide range from 1×105 Pa to 5×10-7 Pa.We suggest that the newly-developed vacuum gauge calibrator be of increasing market demands and of much economic impact because of the wide calibration range,high automation and reasonable portability.
作者
卢耀文
柏向春
代建设
吉建丽
黄成功
闫睿
田虎林
魏萌萌
陈俊儒
周青枝
Lu Yaowen;Bai Xiangchun;Dai Jianshe;Ji Jianli;Yan Rui;Tian Hulin;Huang Chenggong;Wei Mengmeng;Chen Junru;Zhou Qingzhi(Beijing Engineering Technology Research Center of Vacuum Measurement and Test,Beijing 100029,China;Beijing Orient Institute of Measurement and Test,Beijing 100086,China;Xi’an Aircraft Industry(Group)Company LTD,Xi'an 710089,China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2020年第6期531-535,共5页
Chinese Journal of Vacuum Science and Technology
关键词
真空计
现场校准
便携式
校准范围
Vacuum gauge
On-site calibration
Portability
Calibration range
