摘要
分流法超高/极高真空校准装置由极高真空(XHV)系统、超高真空(UHV)系统、流量分流系统三部分组成。使用磁悬浮涡轮分子泵和非蒸散型吸气剂泵组合抽气在XHV校准室获得了10-10 Pa的极高真空;采用的分流法真空规校准方法,使压力校准下限延伸到了10-10 Pa;利用非蒸散型吸气剂泵对惰性气体无抽速的特性,使用惰性气体校准时,减小了校准下限的不确定度;校准装置的校准范围为(10-4～10-10)Pa,合成标准不确定度为1.5%～3.5%。
A flow-separating calibrator was developed, which is mainly composed of three systems： XHV, UHV and flow separation. The ultimate pressure, 10^-10 Pa, was thus obtained in the XHV calibration chamber by combining the magnetically levitated turbomolecular pump with non-evaporable getter （NEG） pump. With the flow-separating calibration used for vacuum gauge, its lower limiting value can be extended to 10^-10 Pa. Because NEG pump has no pumping speed for inert gas, the uncertainty at lower calibration limit is reduced when taking inert gas to test. The calibrator developed has a calibration range from 10^-4 to 10^-10 Pa with a combined standard uncertainty from 1.5% to 3.5%.
出处
《真空》
CAS
北大核心
2007年第6期1-6,共6页
Vacuum
