摘要
在真空系统中,流导作为主要性能参数需要精确测量。介绍了升压法测量小孔分子流流导的测量原理、测量方法、计算公式和不确定度的评定方法。通过对一小孔流导实际测量和不确定度评定,得出升压法测量流导的合成标准不确定度为2.0%,并用线性真空计测量流导的方法对同一小孔的流导测量结果进行了验证。升压法测量流导的方法简单、测量方便,适合于流导的快速测量。
The conductance of some vacuum valve or orifice needs to be measured in vacuum system,. A new method for measuring orifice molecular flow conductance by increasing pressure is put forward. The measuring formula is given. The relative combined standard uncertainty of the orifice conductance is given by evaluation. In addition, the results are validated by the conductance of same orifice measured by the method of linear vacuum gauge. It was found that the increasing pressure method is sample, convenient and quick for conductance measurement.
出处
《真空与低温》
2007年第3期145-150,共6页
Vacuum and Cryogenics
关键词
真空
小孔流导
升压法
不确定度评定
vacuum
orifice conductance
measurement method by increasing pressure
uncertainty analysis
