摘要
利用多组分复合宽化铁电相变温区 ,使薄膜以高的热释电系数出现在较宽的温度范围。在BaTiO3/Pt/Ti/SiO2 /Si衬底上用溶胶 -凝胶法制备了 0 .5 μmKTa1 -x NbxO3(x =0 .45 ,0 .5 0 ,0 .5 5 )三组分等厚度的复合薄膜。 0 .5 μmKTN -0 .0 8μmBT薄膜在 2 8～ 72℃温度范围内 ,1.0kHz时 ,其εr=110 0 ,tanδ =1.2 %。在室温及 12 0kV/cm下极化 3 0min后 ,0 .5 μm复合薄膜在 2 8～72℃温度范围内热释电系数出现峰值 ,平均热释电系数 p =2 .7× 10 - 6 C/cm2 ·K ,电压响应优值Fv=8.99× 10 - 1 0 C·cm/J ,探测度优值Fd=2 7.0× 10 - 8C·cm/J,该薄膜工作温度范围很宽 ,是一种优异的热释电材料。
Thin films of multicomposition composite KTa 1- x Nb x O 3( x =0.45,0.50,0.55) for high pyroelectric coefficient and with wider temperature range were prepared by sol-gel method on BaTiO 3/Pt/Ti/SiO 2/Si substrates. The relative permittivity and dielectric loss of the composite films KTa 1- x Nb x O 3 0.5 μm thick-BaTiO 3 0.08 μm thick are 1 100 and 0.012 at 1.0 kHz in the temperature range from 28 ℃ to 72 ℃respectively. After polarizing in a field intensity of 120 kV/cm at room temperature, the 0.5 μm thick composite films exhibit an excellent pyroelectric behavior with an average pyroelectric coefficient of 2.7×10 -6 C/cm 2·K in above temperature range and optimal values of voltage response and detectivity of 8.99×10 -10 C·cm/J and 27.0×10 -8 C·cm/J respectively.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2002年第4期482-485,共4页
Journal of The Chinese Ceramic Society
基金
国家自然科学基金资助项目 (5 9972 0 0 8)~~
