摘要
用改进的溶胶 -凝胶旋转涂覆技术 ,在Pt/Ti/SiO2 /Si基片上研制出 1～ 2 μm厚 ,具有钙钛矿型结构的PbTiO3、PLT和PZT铅基铁电薄膜。该类铁电薄膜具有良好的结晶特性、优异的介电和热释电性能。
PbTiO 3 (lead titanate) PLT,(lead lanthanum titanate) and PZT (lead zirconium titanate) lead-based perovskite-type structure ferroelectric thin films with the thickness range of 1～2μm were prepared on Pt/Ti/SiO 2/Si substrate using modified sol-gel spin-coating technique.The ferroelectric thin films had good crystallization behaviour,excellent dielectric and pyroelectric properties.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2000年第1期100-101,共2页
Journal of Functional Materials
基金
八六三计划新材料领域资助项目
关键词
铁电薄膜
溶胶-凝胶
介电性能
热释电性能
ferroelectric thin films
sol-gel technique
dielectric properties
pyroelectric properties
