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磁控溅射高温固体自润滑涂层的研究与进展 被引量:7

Research and Development of High Temperature Solid Self-lubricanting Coating Prepared by Magnetron Sputtering
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摘要 近年来,高温固体自润滑涂层在许多领域得到了快速发展,尤其是磁控溅射技术制备的微纳米高温固体自润滑涂层可以满足航空领域应用中对涂层厚度、力学性能、摩擦性能的更高要求。在综合国内外大量文献的基础上,对磁控溅射方法制备的高温固体自润滑涂层的材料体系、工艺参数优化和涂层结构设计取得的进展进行了综述,通过分析涂层组成相影响机理、工艺改进措施和涂层复杂界面结构,提出未来高温固体自润滑涂层有待进一步研究的问题。 In recent years,high temperature solid self-lubricanting coating has been developed rapidly in many fields.Micronano scale high temperature solid self-lubricanting coating prepared by magnetron sputtering technology can meet the requirements of coating thickness,mechanical properties and friction performance for aeronautical applications.On the basis of consulting a large amount of references at home and abroad,progress of corresponding material systems,optimization of magnetron sputtering process parameters and coating structure design for the high temperature solid self-lubricating coating were reviewed.By analyzing the influential mechanism of coating composition,process improvement measures and complex interface structure,the problem of further research of high temperature solid self lubricant coating was put forward.
作者 陈亚军 郁佳琪 赵婕宇 王付胜 CHEN Yajun YU Jiaqi ZHAO Jieyu WANG Fusheng(Sino-European Institute of Aviation Engineering, Civil Aviation University of China, Tianjin 30030)
出处 《材料导报》 EI CAS CSCD 北大核心 2017年第3期32-37,56,共7页 Materials Reports
基金 国家自然科学基金(51301198) 中央高校基本科研业务费中国民航大学专项(ZXH2011C011)
关键词 高温固体自润滑 磁控溅射 涂层结构 high temperature solid self-lubrication magnetron sputtering coating structure
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