摘要
介绍了纳米硬质薄膜的概念、设计思想、超硬机制、制备技术及工艺、性能、应用前景,综述了近几年来国内外纳米硬质薄膜材料研究的最新进展,对纳米硬质薄膜的发展趋势提出了一些看法。
The concept, design superhard rnechanisms, synthesis technologies and processes, properties, applications, and advancement of nano - hard film including nano - multilayers and nano - composite films were reviewed in this paper. Finally the trends in developing of nano - hard film were outlined.
出处
《稀有金属与硬质合金》
CAS
CSCD
2005年第3期37-41,55,共6页
Rare Metals and Cemented Carbides
关键词
纳米硬质薄膜
硬度
纳米多层膜
纳米复合膜
nano - hard film
hardness
nano - multilayer film
nano -composite film
