摘要
提出了一种利用三个CCD探测三路准直光束位置以实现被测物六自由度测量的方法。测量系统包括两部分:一个反射镜和通过连接杆连接的两个CCD为移动部分,固接在被测物上;固定部分的光源、光开关和三个光学准直器产生三路准直光束。其中两路分别投射到两个CCD上,第三路经移动部分的反射镜反射回并由第三个CCD探测。被测物发生六自由度变化时,移动部分同步变化,三个CCD探测的光斑位置也随之变化,通过特定算法可解算出被测物六自由度运动。构建了一个可以表征六自由度测量特性的四自由度测量系统。测量结果表明:在相应测量范围内,与双频激光干涉仪或光电自准直仪测量值相比,系统偏摆角最大差值为1.27″,滚转角最大偏差为1.03″,两个平动位移最大偏差均小于1μm。
Using 3 CCDs to detect the position changes of 3 collimated beams, a six﹣degree﹣of﹣freedom measurement method was presented. The measurement system consisted of two parts. A mirror and two CCDs that were connected together by a link rod form the moving part. It was fixed to and moving along with the measured object. A light source, an optical switch and three optical collimators of the fixed part emitted 3 collimated beams. Two collimated beams projected on two CCDs respectively. The third one was reflected back by the mirror and captured by the third CCD. Six﹣degree﹣of﹣freedom motion of the measured object led to the synchronous change of the moving part, resulting in position changes of 3 light spots on CCDs. Then with a set of algorithms, the six﹣degree﹣of﹣freedom motion of the measured object can be calculated based on these position changes. A four﹣degree﹣of﹣freedom measurement system, which can manifest the characteristics of six﹣degree﹣of﹣freedom measurement, was built and experimental tests were carried out. Within the corresponding measurement range, compared with the results of the dual﹣frequency laser interferometer and photoelectric auto﹣collimator system, the maximum deviations of yaw and roll in this system are 1 . 27＆quot; and 1 . 03＆quot;, and that of two translational movements are less than 1μm.
出处
《红外与激光工程》
EI
CSCD
北大核心
2014年第11期3597-3602,共6页
Infrared and Laser Engineering
基金
北京市自然科学基金(3144028)
关键词
测量
六自由度
准直光
measurement
six﹣degree﹣of﹣freedom
collimated beam
