摘要
提出了一种基于半导体激光单模光纤组件同时测量直线导轨四自由度误差的新方法。以单一准直的激光束作为测量基准,用角锥棱镜和分光器分别作为直线度误差、角度误差测量的敏感器件,实现了水平和竖直方向直线度及俯仰角、偏摆角四个自由度误差的同时测量。分析了系统的测量原理,进行了稳定性、重复性以及与美国API 5D测量系统比对实验,理论分析和实验结果表明,系统测量直线度的分辨率小于0.1μm,角度的分辨率小于0.5″,在测量距离为2 m的条件下,直线度、角度测量精度分别为±1.0μm/m,±0.5″。测量方法具有结构简单、移动部分不带电缆和现场测量方便等优点。
A novel method for measuring four-degree-of-freedom geometric errors of a linear stage is put forward. A single-mode fiber-coupled laser module is used, and the laser beam from this laser module is highly stable, and can be used as the reference line for straightness error and angular error measurements. Only a corner retro-reflector and a beam splitter are adopted in the moving target in order to sense the straightness errors and angular errors. In this way, the horizontal and vertical straightness errors as well as yaw and pitch errors can be measured simultaneously. At the same time, there is no cable connection in the moving target, which gives a great convenience in the workshop measurements. The four-degree-of-freedom measuring system （FDMS） based on the above method has been developed, and the system has the resolution of less than 0.1 micrometer for straightness error measurement and 0.5 arc-see for angular error measurement. The stability, repeatability experiments and the comparison experiments with API 5D laser measuring system were done. Experimental results and theoretical analyses showed that the measurement accuracies of straightness error and angular errors are about ±1.0μm/m and ±0.5″ respectively within the measurement range of 2 m.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2005年第9期1266-1270,共5页
Chinese Journal of Lasers
基金
北京交通大学优秀博士生科技创新基金(48003)资助项目
关键词
测量
四自由度
直线度误差
角度误差
直线导轨
半导体激光单模光纤组件
measurement
four-degree-of-freedom
straightness error
angular errors
linear stage
single-mode fiber-coupled laser module
