摘要
采用直角坐标系统的机床或测量机共有２１项结构误差，其中１８项误差可以用现成的干涉仪测量，另外３项滚转角误差没有现成的仪器测量。提出了一种动态测量滚转角误差的方法，基于偏振面旋转角的测量，用半波片作传感元件，自动读出法给出测量结果。文中介绍了３个关键的问题：法拉第盒的设计、反馈方法消除旋光漂移以及进一步提高分辨率的方法。实验结果表明，这种方法具有良好的线性，分辨率为０．１″，漂移量为０．１５（″）／ｈ。
For coordinate measurement machine (CMM) and machine tools, the accuracy is limited mainly by Abbe errors which come from pitching yawing and rolling. In order to correct Abbe errors, these angles must be measured precisely. The pitching and yawing angle can be measured by interferometer available, but rolling angle was not dynamically measured yet. A dynamically measurement method of rolling angle is introduced, which is based on polarization testing and magneto optic modulation. The drift from Faraday cell is compensated by feed back method, and the structure of the Faraday cell is optimized by the finite element method, therefore the resolution is 0.1(″), the drift angle is 0.15″/h.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
1996年第10期86-91,共6页
Journal of Tsinghua University(Science and Technology)
基金
国家自然科学基金
关键词
滚转角
磁光调制
测量
机床
加工精度
roll angle measurement
magneto optic modulation
polarization test
