摘要
由于集成电路、光碟及平面显示器等产业规模越来越大 ,这些高技术产业对各种超高纯金属及合金溅射靶材的需求量愈来愈多。本文对各种溅射靶的应用情况、市场及发展趋势作简要分析 。
With the development of VLSI, CD and flat panel display (FPD), the demands of sputtering target materials with super high purity are greatly increased in IT. In this paper, the trend of the market and application about these materials are discussed. It will be a reference for the producers of sputtering target materials.
出处
《真空》
CAS
北大核心
2002年第1期1-4,共4页
Vacuum
