摘要
介绍了将LIGA技术及其与牺牲层技术相结合 ,制造可动微结构的工艺方法。并给出了可实现摆动、转动的可动微结构———微执行器。
By combining LIGA technigue with a sacrificial layer technique,the movable microstructures microsensor and a three dimensional acceleration sensor are also to be fabricated.The typical LIGA process and its applications are briefly presented.
出处
《传感器技术》
CSCD
北大核心
2001年第12期54-56,共3页
Journal of Transducer Technology
