摘要
本文综述了ＬＩＧＡ技术。介绍了国内外对ＬＩＧＡ技术的改进与推广。
The LIGA technigue is summarizedin this paper. The modifications and extensions of the LIGA Technigue at home and abroad are briefly described. The application of the LIGA technigue in sensor technigue are also discussed.
出处
《电子器件》
CAS
1997年第2期20-27,共8页
Chinese Journal of Electron Devices
关键词
ILGA技术
X射线光刻
细微加工
微传感器
LIGA Technigue X-ray lithography fabricating microstruoture microsensor.
