摘要
采用MonteCarlo模拟方法 ,对直流电场中甲烷分子的分解过程进行研究 ,计算出电子在甲烷气体中的漂移速度 ,结果与实验符合得很好 ,同时 ,得到了甲烷分解碎片的空间分布曲线 .
The dissociation of methane molecule in the DC electric field has been studied by Monte Carlo method. The drift velocity of electron swarm in CH 4 is computed and the result fully agrees with the experimental value. Besides, we get the spatial distribution contours of the dissociation fragments of methane. These conclusions are very significant for the theoretical study of high quality diamond thin films.
出处
《河北大学学报（自然科学版）》
CAS
2001年第3期249-250,268,共3页
Journal of Hebei University(Natural Science Edition)
