摘要
简要地介绍了以白光干涉理论为基础 ,利用相移干涉法进行表面三维轮廓测量的原理与系统的构成 。
The principle of measurement and instrument of a kind of profiler is briefly described based on the white light interfering method and adopting the phase shift interfering technology.It emphatically discusses the method and technique for measuring 3D surface profile with computer sampling and processing data with high speed.
出处
《传感器技术》
CSCD
北大核心
2001年第8期19-21,24,共4页
Journal of Transducer Technology
关键词
白光
相移干涉法
表面三维轮廓
光学测量
white light
phase shift interfering
3D surface profile
three frames method
five frames method
