摘要
本文介绍了一种利用白光扫描干涉法测量表面三维形貌的仪器原理及其整体结构,分析了影响测量精度的主要因素,给出了最佳干涉位置的识别算法,并用实际测量结果加以论证。
This paper introduces the principle of scanning white light interferometry method and presents the constitution of surface 3D profiler＇s measuring system. And the main factors which influence the precision are analyzed. It empratically discusses the method for observing the best site of interfering.finally, the main factors which influence the precision are analyzed.
出处
《中国仪器仪表》
2006年第4期45-47,共3页
China Instrumentation
关键词
白光扫描
干涉
测量原理
三帧算法
White light scanning Interference Measurement principle Three frame method
