摘要
提出了一种基于数据重组和反滤波的二次相移三点法圆度误差分离技术，可以先行分离出主轴的 回转运动误差，从而能够实现运动误差的在线检测。通过对三个传感器的测量数据按照二次相移原则 进行数据重组，可以在数据处理的首次操作时消除圆度形状误差的影响，从而在二次操作时先行得到运 动误差。权函数的对比分析表明该方法与圆度三点法在本质上的同源性和统一性。仿真与实验结果均 表明：该方法可以先后分离出运动误差和形状误差，具有良好的分离效果。
A novel technique for quadratic phase shift three - point method based on data reconstruction and inverse filtering is proposed in this paper, through which the spindle radial motion error can be separated and gained firstly, and the on - line measurement of motion error can be implemented successfully. According to the principle of quadratic phase shift, data from die three probes can be reconstructed, the influence of roundness form error can be eliminated in the process of the first operation, and the radial error motion will be acquired in the second operation. Based on the comparative analysis of weighting function, the homology and unitarity can be proved by the proposed method for motion error measurement and the common three - point method for roundness measurement. Satisfactory results have been gained in some experiments and simulations.
出处
《光学精密工程》
EI
CAS
CSCD
2001年第4期319-323,共5页
Optics and Precision Engineering
基金
国家自然科学基金资助项目
项目编号:50075056
