摘要
在超精密加工中,采用三传感器误差分离技术,可以在线地同时测得机床主轴的回转误差及工件的圆度,并可定量地分析它们的频谱分量和相互关系。本文从理论和实验两个方面对该技术进行了深入的研究。首先用矩阵方法解决了长期以来不甚清楚的形状失真和参数选择问题,然后构成在线测量系统,在国产超精密车床上进行了大量试验,证明系统稳定可靠,测量精密度不差于0.02μm。测量的结果与英国Talyrond-73圆度仪的测量结果作了比较。
In this paper the mathematical principle of the 3-sensor measuring technique
is introduced,the problems of parameter selections and the form distortions are discussed
with matrix,the data of the on-line experiment shows that the precision of the on-line
roundness measuring equipment we have built is(?)0.02μm.
The built up equipment can be used:(1)to measure the roundness of workpiece on-line,
(2)to measure the spindle error motion simultaneously,(3)to analyse the frequency
spectra of above signals,(4)to measure the profile of the other test pieces,such as the
profile of the master ball for a general roundness instrument.All these can be done with
high accuracy and high efficiency.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1989年第1期64-71,共8页
Chinese Journal of Scientific Instrument
