摘要
设计了一台多阴极的金属蒸气真空弧离子源,它有18个阴极,任一阴极都能在真空状态下被迅速接入电路工作。这是一种新型的强流金属离子源,特别适用于离子注入、材料改性。在脉冲工作方式下,引出了Al、Ti、Cr、Ni、Cu和Nb等元素的离子,平均束流达10mA以上,引出束流与阴极材料、弧流、引出电压等有关。该源的工作真空度为300μPa。
A multi-cathode metal vapor vacuum arc (WEVVA) ion source has been designed. It contains an array of 18 cathodes, any of which can be switched into operation rapidly while under vacuum. As a new kind of intense current metal ion source, it is very suitable for the application of ion implantation and material modification. In a pulsed mode, a time-average ion beam current in excess of 10 mA has been extracted for a range of elements such as Al, Ti, Cr, Nl,Cu,Nb etc. The ion beam current depends on cathode material, arc current, extractor voltage etc. Its operating vacuum pressure is 300μPa.
出处
《核技术》
CAS
CSCD
北大核心
1991年第8期479-484,共6页
Nuclear Techniques
关键词
离子源
真空弧放电
等离子体
Ion source Vacuum arc discharge Plasma Ion beam
