摘要
介绍了新研制成的 MEVVA-Ⅱ和 MEVVA-ⅡA 离子源的结构特点和某些实验结果.新源采用大面积引出,引出直径60mm.该源脉冲工作,最大束流占空比为6%,已引出 Mg,Al,Ti,V,Cr,Fe,Ni,Cu,Zn,Y,Zr,Mo,Nb,Sn,W 和 Pb 等金属元素的离子,平均束流强度在10mA 以上,最大平均束流强度已超过20mA.MEVVA-ⅡA 源还采用了可推进的阴极结构,使阴极寿命大大提高,在引出平均束流10mA(Ti)条件下,已连续稳定运行16h.
New embodiments of MEVVA ion source,MEVVA-Ⅱand MEVVA-Ⅱ A,are developed in which the beam is formed from a 6 cm diameter set of extractor grids.The sources,MEVVA-Ⅱ and MEVVA-ⅡA,are oper- ated in a pulsed mode with a maximum beam duty cycle of 6%.A time average beam current of up to 10～20 mA or more is extracted from a wide range of different cathode materials,like C,Mg,Al,Ti,V,Cr,Fe,Ni,Cu, Zn,Y,Zr,Nb,Mo,Sn,W,and Pb.In the MEVVA-ⅡA,a movable cathode structure is employed.The lifetime of the source is increased greatly.The MEVVA-ⅡA can operate continuously over 16 hours at the average extracted beam current 10 mA.The structure of sources is described and some results are presented.
出处
《北京师范大学学报（自然科学版）》
CAS
CSCD
1992年第2期148-152,共5页
Journal of Beijing Normal University(Natural Science)
基金
国家"八六三"计划资助项目
关键词
离子源
真空弧放电
大束斑
ion source
vacuum arc discharge
broad beam
