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MEVVA离子源凸形引出电极的研制 被引量:1

Gibbous extraction electrode for MEVVA ion source
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摘要 介绍了金属蒸气真空弧(Metal vapor vacuum arc,MEVVA)离子源的凸形引出电极的研制。研究表明, 凸形引出电极可以完成离子束的强制发散功能,从而在较短的引出距离和较小的引出电极面积的条件下得到大的束斑和均匀可应用的束流分布。通过对几种不同的电极结构的比较研究,得到了满足应用要求的凸形引出电极。 Gibbous extraction electrode for MEVVA ion source is introduced. It is indicated that gibbous extraction electrode can be used to force the ion beam spreading widely like a convex. So intenser ion beam and larger uniform beam spot can be obtained in smaller extraction area and shorter extraction distance. Gibbous extraction electrode which can meet the demand of applications was got by experimentally comparing several different structures of electrode.
出处 《核技术》 EI CAS CSCD 北大核心 2006年第2期93-96,共4页 Nuclear Techniques
基金 国家"863"计划项目(AA338020)北京市科技新星A(H020820990120)
关键词 金属蒸气真空弧离子源 引出电极 束流分布 MEVVA ion source, Extraction electrode, Ion beam distribution
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同被引文献10

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