摘要
分别采用电弧离子镀和磁控溅射工艺在TC4钛合金基材表面制备了TiAlN涂层。利用扫描电镜、能谱仪和XRD分析了两种方法制备TiAlN涂层的表面形貌、表面成分和相结构,并对TiAlN涂层的耐蚀性等进行了分析。结果表明,磁控溅射制备的TiAlN涂层较电弧离子镀的致密、均匀,耐蚀性要好。
TiAlN coa ting was deposited on Ti6Al4V titanium alloy by arc ion plating and magnetron sputtering technique.Surface morphology and compositions of TiAlN coating samples were analyzed by SEM,EDS and XRD.Corrosion resisting property of the TC4 titanium alloy and TiAlN coating was analyzed also.The results show that,compared with arc ion plating,TiAlN coating prepared by magnetron sputtering is density,uniformity,and has good corrosion resistance.
出处
《热加工工艺》
CSCD
北大核心
2013年第24期184-186,共3页
Hot Working Technology
关键词
TC4钛合金
TIALN涂层
电弧离子镀
磁控溅射
耐蚀性
titanium alloy
TiAlN coating
arc ion plating
magnetron sputtering
corrosion resisting property
