摘要
提出了一种关于多弧离子镀合金涂层成分离析效应的物理模型。利用该模型，从理论上较为圆满地解释了成分离析的影响因素及其作用机制。
In this paper,a physical model about the effect of composition demixing between alloy coatings and alloy cathode material in multi arc ion plating is proposed. According to this model,the influential factors and their action mechanism for composition demixing are better explained theoretically.
出处
《真空科学与技术》
CSCD
1996年第3期174-178,共5页
Vacuum Science and Technology
基金
冶金部基金
关键词
多弧
离子镀
合金涂层
成分离析
Multi-arc ion plating,Alloy coating,Composition demixing
