摘要
为了满足光学元件曲率半径精密检测的需求，设计了应用激光干涉方法的曲率半径精密检测系统，实现了对口径100～300mm，曲率半径500～2000mm光学元件曲率半径的高精度，非接触式测量。并分析了影响曲率半径测量结果的各项不确定度，进行不确定度合成。最终完成曲率半径精密检测系统的装调，进行验证实验，曲率半径测量结果相对不确定度约7×10^-6，满足了10×10^-6的设计要求。
In order to meet the demand of precision measurement of radius of curvature, precision ROC measurement system was designed based on laser interferometry. High precision, non-contact ROC measurement of optic elements was achieved, whose diameter was 100-300mm and ROC 500-200mm. The factors of ROC measurement results was analyzed and combination of standard uncertainty was caculated. Installation and adjustment of the system and verification experiments was finished. The relative uncertainty of ROC experiment results is above 7×10^-6, it can meet the design demand of 10×10^-6.
出处
《红外与激光工程》
EI
CSCD
北大核心
2013年第8期2221-2225,共5页
Infrared and Laser Engineering
基金
国家科技重大专项支持(2009ZX02205)
关键词
曲率半径测量
激光干涉
不确定度
干涉检验
radius of curvature
laser interference
uncertainty
interferometry
