摘要
介绍一种以USB2.0为接口的实时极紫外光强检测系统。光敏二极管输出电压经模拟放大器OP07放大后,再经模数转换器ADS8322转换得到与光强成线性的数字量,用VC++6.0编程对CY7C68013A芯片I/O端口控制实现对转换后的数字量的实时采集,从而实现对193nm光刻照明系统光强的实时检测。
This paper describes A real-time acquisition system for the UV light intensity based on USB2.0.Photodiode output voltage amplified by the analog amplifier OP07,and then conducted by the ADS8322 AD converter into digital signal.In this paper,programmed by VC＋＋6.0 to control io pins of CY7C68013A and display the digital number to a software interface.We can detect light intensity of 193nm Lithography illumination system by using this device.
出处
《工具技术》
2012年第3期60-62,共3页
Tool Engineering
基金
国家863高技术研究发展计划(2007AA01Z333)
国家重大专项(2009ZX02204-008)
四川省学术和技术带头人培养基金(07GRC-01)
