摘要
针对微机械电场传感器高真空金属封装中存在的电荷累积问题,根据传感器的静电驱动力原理,提出了利用屏蔽层活动结构的振动速度反馈信号结合差分梳齿来调节品质因数的方法。鉴于系统的高阶非线性,利用平均周期法分析了常压封装下自激驱动系统的起振条件和稳态振幅。理论和仿真分析表明,该方法是可行的。直流参考电压VR越大,反馈等效品质因数Q1越小,稳态振幅越大,起振稳定时间越短。时间常数τ越小,越利于抑制幅度的过冲。
Because of the accumulate charge on the surface of metal cap for the electric field micro-sensor with vacuum package,a method making use of the vibration velocity signal and differential combs is proposed to improve the equivalent Q factor.For the obstacle of high order nonlinearity of the system,we had to employ the averaging method for analyzing the system stability and stable vibration amplitude.Theory and simulation results show that the method is feasibility.The larger the referenced DC voltage VR and the smaller equivalent Q1,the shorter the oscillation starting time and larger stable vibration amplitude are.The smaller the time constant value τ is more beneficial to restrain over-swing of the vibration amplitude.
出处
《传感技术学报》
CAS
CSCD
北大核心
2013年第4期509-515,共7页
Chinese Journal of Sensors and Actuators
基金
江苏省气象探测与信息处理重点实验室开放课题项目(KDXS1109)
南京信息工程大学基金预研项目(2012X010)
关键词
电场传感器
自激振荡
品质因数
平均周期法
electric field micro-sensor
self-oscillation
Q-factor
averaging method
