摘要
一种新型的,以压电陶瓷条为驱动、硅为屏蔽和感应电极的微型电场传感器。此种传感器利用了新型的电场感应模式,采用微加工技术制造,使其具备体积小、重量轻、功耗低、便于与其它器件集成等特点,而且制作工艺简单,成本较低。本文阐述了此种传感器的工作原理,并通过计算机模拟验证了可行性,同时描述了新型传感器的结构设计和加工工艺过程。实验数据表明,新型电场传感器的分辨率达到250 V/m。
This paper introduces a miniature electric field sensor （EFS） using dual piezoelectric ceramics bars as driving structure. The new EFS is based on microfabrication technology, which makes it to possess the advantages of small dimensions, lightness, low power consumption and convenience for assembling. This paper introduces the structure, working principle and fabrication process of the new EFS and the simulation results have proved the feasibility of the new EFS. The experimental results show that the sensor has a resolution of 250 V/M.
出处
《电子器件》
CAS
2006年第3期639-642,共4页
Chinese Journal of Electron Devices
基金
国家自然科学基金课题资助"多功能微传感器芯片系统集成技术研究"(90207006)
