摘要
采用有限元方法对一种新型三维电场传感器的敏感结构进行仿真分析,优化结构设计参数,提高传感器的测量灵敏度;对采用优化参数制备的电场传感器进行了性能测试,结果表明,该传感器的输出与模拟仿真结果具有良好的一致性,并且与外部电场呈良好的线性关系,传感器的测量灵敏度可达到50V/m。
The finite element method was used to simulate the sensing structure of a novel three dimensional electric field sensor to optimize the structural parameter and enhance the sensitivity. The sensor designed with optimizing parameters was tested. The experimental results show that the real output of the sensor not only agreed with the results of the simulation, but also had good linearity with the electric field intensity. The sensor can obtain a better sensitivity of 50 V/m.
出处
《传感技术学报》
CAS
CSCD
北大核心
2008年第6期946-950,共5页
Chinese Journal of Sensors and Actuators
关键词
三维电场传感器
有限元
参数优化
three-dimensional electric field sensor
finite element
parameters optimization
