摘要
采用多弧离子镀技术,使用T-iA-lZr合金靶和Cr单质靶,在WC-8%CO硬质合金基体上制备了TiAlZrCr/(Ti,Al,Zr,Cr)N多组元梯度膜。分析了梯度膜的成分、结构和微观组织,并研究了梯度膜的显微硬度和膜/基结合力。研究结果表明,该多组元梯度膜为B1-NaCl型的TiN面心立方结构;薄膜的成分是以TiAlZrCr合金为过渡层的(Ti,Al,Zr,Cr)N梯度膜;薄膜的组织致密均匀,是典型的柱状晶结构;沉积偏压为-50～-200V时,梯度膜均可获得比(Ti,Al,Zr,Cr)N单层膜更高的硬度(最高值为HV4000)和膜/基结合力(临界载荷大于200 N)。
The multi-component gradient TiAlZrCr/（Ti,Al,Zr,Cr）N coatings were deposited by multi-arc ion plating on cemented carbide（WC-8%Co）substrate.The impacts of the deposition conditions on the microstructures and mechanical properties were studied.The coatings were characterized with X-ray diffraction,energy dispersive spectroscopy electron microscopy,and conventional mechanical probes.The results show that the face-centered cubic-phased TiN dominates in the fairly compact,uniform,gradient coatings,with TiAlZrCr alloy as the transition layer,and that the gradient coating significantly improved the mechanical properties of the substrates.For example,at a substrate bias ranging from-50 to-200 V,the gradient coating displays a higher micro-hardness（up to HV4000）and a stronger interfacial adhesion（a load higher than 200 N）than those of the mono-layered（Ti,Al,Zr,Cr）N coatings.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2013年第3期214-218,共5页
Chinese Journal of Vacuum Science and Technology
基金
辽宁省教育厅科学技术研究一般项目(L2012430)
沈阳市科技计划资助项目(1091178-1-00)
关键词
梯度膜
多弧离子镀
硬质合金
显微硬度
结合强度
Gradient film
Multi-arc ion plating
Cemented carbide
Micro-hardness
Adhesion strength
