摘要
采用多弧离子镀技术,以Al30Ti70合金靶、单元素Zr靶共沉积的方式,通过调控沉积靶电流,制备了具有不同组元配比的(AlTiZr)N硬质膜。通过XRD、SEM、硬度计、摩擦磨损仪对膜层的表面和断面成分、组织形貌、相组成、表面硬度及摩擦磨损性能进行了表征。研究了晶格负畸变对(AlTiZr)N硬质膜相结构、硬度及耐磨性能的影响。实验结果表明:当(AlTiZr)N硬质膜中Al、Ti的原子占比分别在7%~16%、33%~48%范围内增加,而Zr原子占比相应地在60%~36%范围内减少时,膜层发生晶格负畸变。随着晶格负畸变程度增加,分离的(AlTiZr)N相逐渐融合。膜层的显微硬度呈现单调递增的变化趋势,Al_(16)Ti_(48)Zr_(36)N膜的硬度最大值为2200 HV0.025/20,但膜层摩擦系数不随硬度单调变化,当硬度大于1600 HV0.025/20时,磨粒磨损产生的硬磨粒会增大膜层的摩擦系数,降低耐磨性。
Using multi-arc ion plating technology,(AlTiZr)N hard coatings with different component ratios were prepared by co-depositing an Al 30 Ti 70 alloy target and a single-element Zr target while adjusting the deposition target current.The surface and cross-sectional composition,microstructure,phase composition,surface hardness,and friction-wear properties of the coatings were characterized using XRD,SEM,a hardness tester,and a friction-wear tester.The effect of lattice negative distortion on the phase structure,hardness,and wear resistance of the(AlTiZr)N hard coatings was investigated.Experimental results show that when the atomic percentages of Al and Ti in the(AlTiZr)N hard coatings increase within the ranges of 7%~16%and 33%~48%,respectively,while the atomic percentage of Zr correspondingly decreases within the range of 60%~36%,lattice negative distortion occurs in the coatings.As the degree of lattice negative distortion increases,the separated(AlTiZr)N phases gradually merge.The microhardness of the coatings exhibits a monotonically increasing trend,with the Al_(16)Ti_(48)Zr_(36)N coating reaching a maximum hardness of 2200 HV0.025/20.However,the friction coefficient of the coatings does not vary monotonically with hardness.When the hardness exceeds 1600 HV0.025/20,hard abrasive particles generated by abrasive wear increase the friction coefficient of the coatings and reduce their wear resistance.
作者
张钧
许正磊
戴步实
潘明明
ZHANG Jun;XU Zhenglei;DAI Bushi;PAN Mingming(College of Mechanical Engineering,Shenyang University,Shenyang 110044,China)
出处
《沈阳大学学报(自然科学版)》
2025年第6期459-465,F0002,共8页
Journal of Shenyang University(Natural Science)
基金
辽宁省教育厅基本科研项目(JYTMS20231162)。
关键词
(AlTiZr)N硬质膜
多弧离子镀
晶格负畸变
硬度
相结构
耐磨性
(AlTiZr)N hard coating
multi-arc ion deposition
lattice negative distortion
hardness
phase structure
wear resistance
