摘要
介绍了一种新型半导体效应参数测量装置 ,以 90 Sr- 90 Y为模拟源辐射装置与半导体参数测试仪共同组成半导体器件辐射效应测量系统 ,可进行各类器件和电路总剂量辐照效应测量与分析 ,系统实现了在线测量和辐射剂量率的连续调节 ,特别适宜于对卫星空间辐射环境的模拟。利用系统开展了几种 CMOS器件辐射效应实验研究 ,给出了器件在 90 Sr- 90 Y源低剂量率辐射条件下的失效剂量。
An on line measurement system using 90 Sr 90 Y soure for radiation effect in semiconductor has been set up. This facility can be used to simulate space radiation environment, and the static and dynamic parameters of electrical devices have been presented. Especially the on line measuring and consecutive radiation effect can be provided. The results of responses to 90 Sr 90 Y source denoted that the conventional 60 Co source can be replaced by the 90 Sr 90 Y source for low dose rate effect research.
出处
《核电子学与探测技术》
CAS
CSCD
北大核心
2000年第3期180-182,232,共4页
Nuclear Electronics & Detection Technology
