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KH560/KH570改性SiO_2增透膜的制备 被引量:6

Preparation of KH560/KH570 Modified SiO_2 Antireflective Coating
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摘要 以γ-缩水甘油醚氧丙基三甲氧基硅烷(KH560)和γ-甲基丙烯酰氧基丙基三甲氧基硅烷(KH570)为改性剂,正硅酸乙酯(TEOS)为前驱体,盐酸(HCl)为催化剂,利用溶胶-凝胶法制备SiO2/KH560/KH570增透膜。研究了反应物配比对溶胶性能的影响,测试了薄膜的光学以及力学性能。结果表明,随着酸用量的增加,溶胶粘度增加,凝胶时间缩短;SiO2/KH560/KH570薄膜在波段350~800nm间平均透过率增加3%~4%,具有良好的增透效果,而且抗划伤能力强。 The organic-inorganic composite sol was prepared through the sol-gel process with TEOS as organic precursor, KH560 or KH570 as the inorganic modifier, HCl as the catalyst, respectively, and spin-coated on the glass substrate as the antireflective film. The relationship between the reactant formula with sol properties was fully studied, and which demonstrated that with the increase of the consumption of HCl in reaction, the viscosity of the sol increase, and the time for forming gel get shorter. The optical and mechanical properties of the film were characterized, and the results show that the glass with the antireflective film can increase the transmission in 3 % to 4% ratio compared to the glass without the antireflective film in the spectra region of 35nm to to 800nm.
出处 《材料导报》 EI CAS CSCD 北大核心 2012年第14期39-42,共4页 Materials Reports
基金 浙江省科技计划公益技术研究工业项目(2010C31081) 浙江省教育厅科研计划项目(Y201018846) 深圳市功能高分子材料重点实验室资助项目(J20100521)
关键词 溶胶-凝胶法 增透膜 KH560 KH570 sol-gel, antireflective coating, KH560, KH570
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